5/8/2010	1:01:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2010	1:01:12 PM	Recipe started at 1:01 PM
5/8/2010	1:01:12 PM	H2 valve closed
5/8/2010	1:01:12 PM	BCl3 valve closed
5/8/2010	1:01:12 PM	PH3 valve closed
5/8/2010	1:01:12 PM	SiCl4 pre valve closed
5/8/2010	1:01:12 PM	SiCl4 post valve closed
5/8/2010	1:01:12 PM	Main Vac valve closed
5/8/2010	1:01:12 PM	Bypass valve closed
5/8/2010	1:01:12 PM	Bubbler valve closed
5/8/2010	1:01:12 PM	Helium valve opened
5/8/2010	1:01:12 PM	Helium MFC set to  500.000000
5/8/2010	1:01:12 PM	H2 MFC set to  0.000000
5/8/2010	1:01:12 PM	BCl3 MFC set to  0.000000
5/8/2010	1:01:12 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:01:12 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:01:12 PM	Tube furnace set to 0
5/8/2010	1:02:33 PM	Helium valve closed
5/8/2010	1:02:33 PM	H2 valve closed
5/8/2010	1:02:33 PM	BCl3 valve closed
5/8/2010	1:02:33 PM	PH3 valve closed
5/8/2010	1:02:33 PM	SiCl4 pre valve closed
5/8/2010	1:02:33 PM	SiCl4 post valve closed
5/8/2010	1:02:33 PM	Main Vac valve closed
5/8/2010	1:02:33 PM	Bypass valve closed
5/8/2010	1:02:33 PM	Bubbler valve closed
5/8/2010	1:02:33 PM	Helium MFC set to  0.000000
5/8/2010	1:02:33 PM	H2 MFC set to  0.000000
5/8/2010	1:02:33 PM	BCl3 MFC set to  0.000000
5/8/2010	1:02:33 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:02:33 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:02:33 PM	Tube furnace set to 0
5/8/2010	1:02:33 PM	Run finished at 1:02 PM
5/8/2010	1:02:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2010	1:11:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	1:11:37 PM	Recipe started at 1:11 PM
5/8/2010	1:11:37 PM	Helium valve closed
5/8/2010	1:11:37 PM	H2 valve closed
5/8/2010	1:11:37 PM	BCl3 valve closed
5/8/2010	1:11:37 PM	PH3 valve closed
5/8/2010	1:11:37 PM	SiCl4 pre valve closed
5/8/2010	1:11:37 PM	SiCl4 post valve closed
5/8/2010	1:11:37 PM	Main Vac valve closed
5/8/2010	1:11:37 PM	Bubbler valve closed
5/8/2010	1:11:37 PM	Bypass valve opened
5/8/2010	1:11:37 PM	Helium MFC set to  0.000000
5/8/2010	1:11:37 PM	H2 MFC set to  0.000000
5/8/2010	1:11:37 PM	BCl3 MFC set to  0.000000
5/8/2010	1:11:37 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:11:37 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:11:37 PM	Tube furnace set to 0
5/8/2010	1:12:20 PM	Helium valve closed
5/8/2010	1:12:20 PM	H2 valve closed
5/8/2010	1:12:20 PM	BCl3 valve closed
5/8/2010	1:12:20 PM	PH3 valve closed
5/8/2010	1:12:20 PM	SiCl4 pre valve closed
5/8/2010	1:12:20 PM	SiCl4 post valve closed
5/8/2010	1:12:20 PM	Bubbler valve closed
5/8/2010	1:12:20 PM	Main Vac valve opened
5/8/2010	1:12:20 PM	Bypass valve opened
5/8/2010	1:12:20 PM	Helium MFC set to  0.000000
5/8/2010	1:12:20 PM	H2 MFC set to  0.000000
5/8/2010	1:12:20 PM	BCl3 MFC set to  0.000000
5/8/2010	1:12:20 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:12:20 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:12:21 PM	Tube furnace set to 0
5/8/2010	1:12:21 PM	Run finished at 1:12 PM
5/8/2010	1:12:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	1:16:03 PM	Helium MFC set to  0.000000
5/8/2010	1:16:18 PM	Helium MFC set to  100.000000
5/8/2010	1:16:24 PM	Helium valve opened
5/8/2010	1:16:46 PM	Helium valve closed
5/8/2010	1:23:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2010	1:23:48 PM	Recipe started at 1:23 PM
5/8/2010	1:23:48 PM	H2 valve closed
5/8/2010	1:23:48 PM	BCl3 valve closed
5/8/2010	1:23:48 PM	PH3 valve closed
5/8/2010	1:23:48 PM	SiCl4 pre valve closed
5/8/2010	1:23:48 PM	SiCl4 post valve closed
5/8/2010	1:23:48 PM	Main Vac valve closed
5/8/2010	1:23:48 PM	Bypass valve closed
5/8/2010	1:23:48 PM	Bubbler valve closed
5/8/2010	1:23:48 PM	Helium valve opened
5/8/2010	1:23:48 PM	Helium MFC set to  500.000000
5/8/2010	1:23:48 PM	H2 MFC set to  0.000000
5/8/2010	1:23:48 PM	BCl3 MFC set to  0.000000
5/8/2010	1:23:48 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:23:48 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:23:48 PM	Tube furnace set to 0
5/8/2010	1:25:10 PM	Helium valve closed
5/8/2010	1:25:10 PM	H2 valve closed
5/8/2010	1:25:10 PM	BCl3 valve closed
5/8/2010	1:25:10 PM	PH3 valve closed
5/8/2010	1:25:10 PM	SiCl4 pre valve closed
5/8/2010	1:25:10 PM	SiCl4 post valve closed
5/8/2010	1:25:10 PM	Main Vac valve closed
5/8/2010	1:25:10 PM	Bypass valve closed
5/8/2010	1:25:10 PM	Bubbler valve closed
5/8/2010	1:25:10 PM	Helium MFC set to  0.000000
5/8/2010	1:25:10 PM	H2 MFC set to  0.000000
5/8/2010	1:25:10 PM	BCl3 MFC set to  0.000000
5/8/2010	1:25:10 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:25:10 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:25:10 PM	Tube furnace set to 0
5/8/2010	1:25:10 PM	Run finished at 1:25 PM
5/8/2010	1:25:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2010	1:27:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	1:27:52 PM	Recipe started at 1:27 PM
5/8/2010	1:27:52 PM	Helium valve closed
5/8/2010	1:27:52 PM	H2 valve closed
5/8/2010	1:27:52 PM	BCl3 valve closed
5/8/2010	1:27:52 PM	PH3 valve closed
5/8/2010	1:27:52 PM	SiCl4 pre valve closed
5/8/2010	1:27:52 PM	SiCl4 post valve closed
5/8/2010	1:27:52 PM	Main Vac valve closed
5/8/2010	1:27:52 PM	Bubbler valve closed
5/8/2010	1:27:52 PM	Bypass valve opened
5/8/2010	1:27:52 PM	Helium MFC set to  0.000000
5/8/2010	1:27:52 PM	H2 MFC set to  0.000000
5/8/2010	1:27:52 PM	BCl3 MFC set to  0.000000
5/8/2010	1:27:52 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:27:52 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:27:52 PM	Tube furnace set to 0
5/8/2010	1:28:35 PM	Helium valve closed
5/8/2010	1:28:35 PM	H2 valve closed
5/8/2010	1:28:35 PM	BCl3 valve closed
5/8/2010	1:28:35 PM	PH3 valve closed
5/8/2010	1:28:35 PM	SiCl4 pre valve closed
5/8/2010	1:28:35 PM	SiCl4 post valve closed
5/8/2010	1:28:35 PM	Bubbler valve closed
5/8/2010	1:28:35 PM	Main Vac valve opened
5/8/2010	1:28:35 PM	Bypass valve opened
5/8/2010	1:28:35 PM	Helium MFC set to  0.000000
5/8/2010	1:28:35 PM	H2 MFC set to  0.000000
5/8/2010	1:28:35 PM	BCl3 MFC set to  0.000000
5/8/2010	1:28:35 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:28:35 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:28:35 PM	Tube furnace set to 0
5/8/2010	1:28:35 PM	Run finished at 1:28 PM
5/8/2010	1:28:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	1:28:47 PM	Helium MFC set to  100.000000
5/8/2010	1:28:48 PM	Helium valve opened
5/8/2010	1:29:16 PM	Helium valve closed
5/8/2010	1:37:59 PM	Helium valve opened
5/8/2010	1:42:54 PM	Helium valve closed
5/8/2010	1:44:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/8/2010	1:44:27 PM	Recipe started at 1:44 PM
5/8/2010	1:44:27 PM	Helium valve closed
5/8/2010	1:44:27 PM	H2 valve closed
5/8/2010	1:44:27 PM	BCl3 valve closed
5/8/2010	1:44:27 PM	PH3 valve closed
5/8/2010	1:44:27 PM	SiCl4 pre valve closed
5/8/2010	1:44:27 PM	SiCl4 post valve closed
5/8/2010	1:44:27 PM	Main Vac valve closed
5/8/2010	1:44:27 PM	Bypass valve closed
5/8/2010	1:44:27 PM	Bubbler valve closed
5/8/2010	1:44:27 PM	Helium MFC set to  0.000000
5/8/2010	1:44:27 PM	H2 MFC set to  0.000000
5/8/2010	1:44:27 PM	BCl3 MFC set to  0.000000
5/8/2010	1:44:27 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:44:27 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:44:27 PM	Tube furnace set to 0
5/8/2010	1:44:28 PM	Run finished at 1:44 PM
5/8/2010	1:44:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/8/2010	1:44:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	1:44:43 PM	Recipe started at 1:44 PM
5/8/2010	1:44:43 PM	Helium valve closed
5/8/2010	1:44:43 PM	H2 valve closed
5/8/2010	1:44:43 PM	BCl3 valve closed
5/8/2010	1:44:43 PM	PH3 valve closed
5/8/2010	1:44:43 PM	SiCl4 pre valve closed
5/8/2010	1:44:43 PM	SiCl4 post valve closed
5/8/2010	1:44:43 PM	Main Vac valve closed
5/8/2010	1:44:43 PM	Bubbler valve closed
5/8/2010	1:44:43 PM	Bypass valve opened
5/8/2010	1:44:43 PM	Helium MFC set to  0.000000
5/8/2010	1:44:43 PM	H2 MFC set to  0.000000
5/8/2010	1:44:43 PM	BCl3 MFC set to  0.000000
5/8/2010	1:44:43 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:44:43 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:44:43 PM	Tube furnace set to 0
5/8/2010	1:44:43 PM	Helium valve closed
5/8/2010	1:44:43 PM	H2 valve closed
5/8/2010	1:44:43 PM	BCl3 valve closed
5/8/2010	1:44:43 PM	PH3 valve closed
5/8/2010	1:44:43 PM	SiCl4 pre valve closed
5/8/2010	1:44:43 PM	SiCl4 post valve closed
5/8/2010	1:44:43 PM	Bubbler valve closed
5/8/2010	1:44:43 PM	Main Vac valve opened
5/8/2010	1:44:43 PM	Bypass valve opened
5/8/2010	1:44:43 PM	Helium MFC set to  0.000000
5/8/2010	1:44:43 PM	H2 MFC set to  0.000000
5/8/2010	1:44:43 PM	BCl3 MFC set to  0.000000
5/8/2010	1:44:43 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:44:43 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:44:43 PM	Tube furnace set to 0
5/8/2010	1:44:44 PM	Run finished at 1:44 PM
5/8/2010	1:44:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	1:45:26 PM	Helium MFC set to  100.000000
5/8/2010	1:45:31 PM	H2 MFC set to  30.000000
5/8/2010	1:45:32 PM	Helium valve opened
5/8/2010	1:46:04 PM	Helium valve closed
5/8/2010	1:47:25 PM	Recipe started at 1:47 PM
5/8/2010	1:47:25 PM	Helium valve closed
5/8/2010	1:47:25 PM	BCl3 valve closed
5/8/2010	1:47:25 PM	PH3 valve closed
5/8/2010	1:47:25 PM	SiCl4 pre valve closed
5/8/2010	1:47:25 PM	SiCl4 post valve closed
5/8/2010	1:47:25 PM	Main Vac valve closed
5/8/2010	1:47:25 PM	Bypass valve closed
5/8/2010	1:47:25 PM	Bubbler valve closed
5/8/2010	1:47:25 PM	H2 valve opened
5/8/2010	1:47:25 PM	Helium MFC set to  0.000000
5/8/2010	1:47:25 PM	H2 MFC set to  500.000000
5/8/2010	1:47:25 PM	BCl3 MFC set to  0.000000
5/8/2010	1:47:25 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:47:25 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:47:25 PM	Tube furnace set to 0
5/8/2010	1:48:49 PM	Helium valve closed
5/8/2010	1:48:49 PM	BCl3 valve closed
5/8/2010	1:48:49 PM	PH3 valve closed
5/8/2010	1:48:49 PM	SiCl4 pre valve closed
5/8/2010	1:48:49 PM	SiCl4 post valve closed
5/8/2010	1:48:49 PM	Main Vac valve closed
5/8/2010	1:48:49 PM	Bypass valve closed
5/8/2010	1:48:49 PM	H2 valve opened
5/8/2010	1:48:49 PM	Bubbler valve opened
5/8/2010	1:48:49 PM	Helium MFC set to  0.000000
5/8/2010	1:48:49 PM	H2 MFC set to  500.000000
5/8/2010	1:48:49 PM	BCl3 MFC set to  0.000000
5/8/2010	1:48:49 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:48:49 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:48:49 PM	Tube furnace set to 1000
5/8/2010	1:54:55 PM	Run aborted at 1:54 PM
5/8/2010	1:54:55 PM	Helium valve closed
5/8/2010	1:54:55 PM	H2 valve closed
5/8/2010	1:54:55 PM	BCl3 valve closed
5/8/2010	1:54:55 PM	PH3 valve closed
5/8/2010	1:54:55 PM	SiCl4 pre valve closed
5/8/2010	1:54:55 PM	SiCl4 post valve closed
5/8/2010	1:54:55 PM	Bypass valve closed
5/8/2010	1:54:55 PM	Main Vac valve closed
5/8/2010	1:54:55 PM	Bubbler valve closed
5/8/2010	1:54:55 PM	Helium MFC set to  0.000000
5/8/2010	1:54:55 PM	H2 MFC set to  0.000000
5/8/2010	1:54:55 PM	BCl3 MFC set to  0.000000
5/8/2010	1:54:55 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:54:55 PM	Tube furnace set to 0
5/8/2010	1:55:58 PM	Recipe started at 1:55 PM
5/8/2010	1:55:58 PM	Helium valve closed
5/8/2010	1:55:58 PM	BCl3 valve closed
5/8/2010	1:55:58 PM	PH3 valve closed
5/8/2010	1:55:58 PM	SiCl4 pre valve closed
5/8/2010	1:55:58 PM	SiCl4 post valve closed
5/8/2010	1:55:58 PM	Main Vac valve closed
5/8/2010	1:55:58 PM	Bypass valve closed
5/8/2010	1:55:58 PM	Bubbler valve closed
5/8/2010	1:55:58 PM	H2 valve opened
5/8/2010	1:55:58 PM	Helium MFC set to  0.000000
5/8/2010	1:55:58 PM	H2 MFC set to  500.000000
5/8/2010	1:55:58 PM	BCl3 MFC set to  0.000000
5/8/2010	1:55:58 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:55:58 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:55:58 PM	Tube furnace set to 0
5/8/2010	1:55:59 PM	Helium valve closed
5/8/2010	1:55:59 PM	BCl3 valve closed
5/8/2010	1:55:59 PM	PH3 valve closed
5/8/2010	1:55:59 PM	SiCl4 pre valve closed
5/8/2010	1:55:59 PM	SiCl4 post valve closed
5/8/2010	1:55:59 PM	Main Vac valve closed
5/8/2010	1:55:59 PM	Bypass valve closed
5/8/2010	1:55:59 PM	H2 valve opened
5/8/2010	1:55:59 PM	Bubbler valve opened
5/8/2010	1:55:59 PM	Helium MFC set to  0.000000
5/8/2010	1:55:59 PM	H2 MFC set to  500.000000
5/8/2010	1:55:59 PM	BCl3 MFC set to  0.000000
5/8/2010	1:55:59 PM	SiCl4 MFC set to  0.000000
5/8/2010	1:55:59 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	1:55:59 PM	Tube furnace set to 1000
5/8/2010	2:08:24 PM	Helium valve closed
5/8/2010	2:08:24 PM	BCl3 valve closed
5/8/2010	2:08:24 PM	PH3 valve closed
5/8/2010	2:08:24 PM	SiCl4 pre valve closed
5/8/2010	2:08:24 PM	SiCl4 post valve closed
5/8/2010	2:08:24 PM	Main Vac valve closed
5/8/2010	2:08:24 PM	Bypass valve closed
5/8/2010	2:08:24 PM	H2 valve opened
5/8/2010	2:08:24 PM	Bubbler valve opened
5/8/2010	2:08:24 PM	Helium MFC set to  0.000000
5/8/2010	2:08:24 PM	H2 MFC set to  500.000000
5/8/2010	2:08:24 PM	BCl3 MFC set to  0.000000
5/8/2010	2:08:24 PM	SiCl4 MFC set to  0.000000
5/8/2010	2:08:24 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	2:08:25 PM	Tube furnace set to 1000
5/8/2010	2:18:25 PM	H2 valve closed
5/8/2010	2:18:25 PM	BCl3 valve closed
5/8/2010	2:18:25 PM	PH3 valve closed
5/8/2010	2:18:25 PM	SiCl4 pre valve closed
5/8/2010	2:18:25 PM	SiCl4 post valve closed
5/8/2010	2:18:25 PM	Main Vac valve closed
5/8/2010	2:18:25 PM	Bypass valve closed
5/8/2010	2:18:25 PM	Helium valve opened
5/8/2010	2:18:25 PM	Bubbler valve opened
5/8/2010	2:18:25 PM	Helium MFC set to  500.000000
5/8/2010	2:18:25 PM	H2 MFC set to  0.000000
5/8/2010	2:18:25 PM	BCl3 MFC set to  0.000000
5/8/2010	2:18:25 PM	SiCl4 MFC set to  0.000000
5/8/2010	2:18:25 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	2:18:25 PM	Tube furnace set to 750
5/8/2010	2:36:30 PM	H2 valve closed
5/8/2010	2:36:30 PM	BCl3 valve closed
5/8/2010	2:36:30 PM	PH3 valve closed
5/8/2010	2:36:30 PM	SiCl4 pre valve closed
5/8/2010	2:36:30 PM	SiCl4 post valve closed
5/8/2010	2:36:30 PM	Main Vac valve closed
5/8/2010	2:36:30 PM	Bypass valve closed
5/8/2010	2:36:30 PM	Helium valve opened
5/8/2010	2:36:30 PM	Bubbler valve opened
5/8/2010	2:36:30 PM	Helium MFC set to  500.000000
5/8/2010	2:36:30 PM	H2 MFC set to  0.000000
5/8/2010	2:36:30 PM	BCl3 MFC set to  0.000000
5/8/2010	2:36:30 PM	SiCl4 MFC set to  0.000000
5/8/2010	2:36:30 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	2:36:30 PM	Tube furnace set to 0
5/8/2010	2:51:34 PM	Helium valve closed
5/8/2010	2:51:34 PM	H2 valve closed
5/8/2010	2:51:34 PM	BCl3 valve closed
5/8/2010	2:51:34 PM	PH3 valve closed
5/8/2010	2:51:34 PM	SiCl4 pre valve closed
5/8/2010	2:51:34 PM	SiCl4 post valve closed
5/8/2010	2:51:34 PM	Main Vac valve closed
5/8/2010	2:51:34 PM	Bypass valve closed
5/8/2010	2:51:34 PM	Bubbler valve closed
5/8/2010	2:51:34 PM	Helium MFC set to  0.000000
5/8/2010	2:51:34 PM	H2 MFC set to  0.000000
5/8/2010	2:51:34 PM	BCl3 MFC set to  0.000000
5/8/2010	2:51:34 PM	SiCl4 MFC set to  0.000000
5/8/2010	2:51:34 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	2:51:35 PM	Tube furnace set to 0
5/8/2010	2:51:35 PM	Run finished at 2:51 PM
5/8/2010	3:00:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	3:00:53 PM	Recipe started at 3:00 PM
5/8/2010	3:00:53 PM	Helium valve closed
5/8/2010	3:00:53 PM	H2 valve closed
5/8/2010	3:00:53 PM	BCl3 valve closed
5/8/2010	3:00:53 PM	PH3 valve closed
5/8/2010	3:00:53 PM	SiCl4 pre valve closed
5/8/2010	3:00:53 PM	SiCl4 post valve closed
5/8/2010	3:00:53 PM	Main Vac valve closed
5/8/2010	3:00:53 PM	Bubbler valve closed
5/8/2010	3:00:53 PM	Bypass valve opened
5/8/2010	3:00:53 PM	Helium MFC set to  0.000000
5/8/2010	3:00:53 PM	H2 MFC set to  0.000000
5/8/2010	3:00:53 PM	BCl3 MFC set to  0.000000
5/8/2010	3:00:53 PM	SiCl4 MFC set to  0.000000
5/8/2010	3:00:53 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	3:00:53 PM	Tube furnace set to 0
5/8/2010	3:01:36 PM	Helium valve closed
5/8/2010	3:01:37 PM	H2 valve closed
5/8/2010	3:01:37 PM	BCl3 valve closed
5/8/2010	3:01:37 PM	PH3 valve closed
5/8/2010	3:01:37 PM	SiCl4 pre valve closed
5/8/2010	3:01:37 PM	SiCl4 post valve closed
5/8/2010	3:01:37 PM	Bubbler valve closed
5/8/2010	3:01:37 PM	Main Vac valve opened
5/8/2010	3:01:37 PM	Bypass valve opened
5/8/2010	3:01:37 PM	Helium MFC set to  0.000000
5/8/2010	3:01:37 PM	H2 MFC set to  0.000000
5/8/2010	3:01:37 PM	BCl3 MFC set to  0.000000
5/8/2010	3:01:37 PM	SiCl4 MFC set to  0.000000
5/8/2010	3:01:37 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	3:01:37 PM	Tube furnace set to 0
5/8/2010	3:01:37 PM	Run finished at 3:01 PM
5/8/2010	3:01:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	3:04:15 PM	Helium MFC set to  100.000000
5/8/2010	3:04:16 PM	Helium valve opened
5/8/2010	3:04:35 PM	Helium valve closed
5/8/2010	3:47:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/8/2010	3:47:39 PM	Recipe started at 3:47 PM
5/8/2010	3:47:39 PM	Helium valve closed
5/8/2010	3:47:39 PM	H2 valve closed
5/8/2010	3:47:39 PM	BCl3 valve closed
5/8/2010	3:47:39 PM	PH3 valve closed
5/8/2010	3:47:39 PM	SiCl4 pre valve closed
5/8/2010	3:47:39 PM	SiCl4 post valve closed
5/8/2010	3:47:39 PM	Main Vac valve closed
5/8/2010	3:47:39 PM	Bypass valve closed
5/8/2010	3:47:39 PM	Bubbler valve closed
5/8/2010	3:47:39 PM	Helium MFC set to  0.000000
5/8/2010	3:47:39 PM	H2 MFC set to  0.000000
5/8/2010	3:47:39 PM	BCl3 MFC set to  0.000000
5/8/2010	3:47:39 PM	SiCl4 MFC set to  0.000000
5/8/2010	3:47:39 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	3:47:39 PM	Tube furnace set to 0
5/8/2010	3:47:39 PM	Run finished at 3:47 PM
5/8/2010	3:47:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/8/2010	3:47:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	3:47:45 PM	Recipe started at 3:47 PM
5/8/2010	3:47:45 PM	Helium valve closed
5/8/2010	3:47:45 PM	H2 valve closed
5/8/2010	3:47:45 PM	BCl3 valve closed
5/8/2010	3:47:45 PM	PH3 valve closed
5/8/2010	3:47:45 PM	SiCl4 pre valve closed
5/8/2010	3:47:45 PM	SiCl4 post valve closed
5/8/2010	3:47:45 PM	Main Vac valve closed
5/8/2010	3:47:45 PM	Bubbler valve closed
5/8/2010	3:47:45 PM	Bypass valve opened
5/8/2010	3:47:45 PM	Helium MFC set to  0.000000
5/8/2010	3:47:45 PM	H2 MFC set to  0.000000
5/8/2010	3:47:45 PM	BCl3 MFC set to  0.000000
5/8/2010	3:47:45 PM	SiCl4 MFC set to  0.000000
5/8/2010	3:47:45 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	3:47:45 PM	Tube furnace set to 0
5/8/2010	3:47:46 PM	Helium valve closed
5/8/2010	3:47:46 PM	H2 valve closed
5/8/2010	3:47:46 PM	BCl3 valve closed
5/8/2010	3:47:46 PM	PH3 valve closed
5/8/2010	3:47:46 PM	SiCl4 pre valve closed
5/8/2010	3:47:46 PM	SiCl4 post valve closed
5/8/2010	3:47:46 PM	Bubbler valve closed
5/8/2010	3:47:46 PM	Main Vac valve opened
5/8/2010	3:47:46 PM	Bypass valve opened
5/8/2010	3:47:46 PM	Helium MFC set to  0.000000
5/8/2010	3:47:46 PM	H2 MFC set to  0.000000
5/8/2010	3:47:46 PM	BCl3 MFC set to  0.000000
5/8/2010	3:47:46 PM	SiCl4 MFC set to  0.000000
5/8/2010	3:47:46 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	3:47:46 PM	Tube furnace set to 0
5/8/2010	3:47:46 PM	Run finished at 3:47 PM
5/8/2010	3:47:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	3:47:59 PM	Helium MFC set to  100.000000
5/8/2010	3:48:00 PM	Helium valve opened
5/8/2010	3:49:05 PM	Helium valve closed
5/8/2010	3:50:24 PM	Recipe started at 3:50 PM
5/8/2010	3:50:24 PM	Helium valve closed
5/8/2010	3:50:24 PM	BCl3 valve closed
5/8/2010	3:50:24 PM	PH3 valve closed
5/8/2010	3:50:24 PM	SiCl4 pre valve closed
5/8/2010	3:50:24 PM	SiCl4 post valve closed
5/8/2010	3:50:24 PM	Main Vac valve closed
5/8/2010	3:50:24 PM	Bypass valve closed
5/8/2010	3:50:24 PM	Bubbler valve closed
5/8/2010	3:50:25 PM	H2 valve opened
5/8/2010	3:50:25 PM	Helium MFC set to  0.000000
5/8/2010	3:50:25 PM	H2 MFC set to  500.000000
5/8/2010	3:50:25 PM	BCl3 MFC set to  0.000000
5/8/2010	3:50:25 PM	SiCl4 MFC set to  0.000000
5/8/2010	3:50:25 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	3:50:25 PM	Tube furnace set to 0
5/8/2010	3:51:48 PM	Helium valve closed
5/8/2010	3:51:48 PM	BCl3 valve closed
5/8/2010	3:51:48 PM	PH3 valve closed
5/8/2010	3:51:48 PM	SiCl4 pre valve closed
5/8/2010	3:51:48 PM	SiCl4 post valve closed
5/8/2010	3:51:48 PM	Main Vac valve closed
5/8/2010	3:51:48 PM	Bypass valve closed
5/8/2010	3:51:48 PM	H2 valve opened
5/8/2010	3:51:48 PM	Bubbler valve opened
5/8/2010	3:51:48 PM	Helium MFC set to  0.000000
5/8/2010	3:51:48 PM	H2 MFC set to  500.000000
5/8/2010	3:51:48 PM	BCl3 MFC set to  0.000000
5/8/2010	3:51:48 PM	SiCl4 MFC set to  0.000000
5/8/2010	3:51:48 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	3:51:48 PM	Tube furnace set to 1000
5/8/2010	4:11:48 PM	Helium valve closed
5/8/2010	4:11:48 PM	BCl3 valve closed
5/8/2010	4:11:48 PM	PH3 valve closed
5/8/2010	4:11:48 PM	Main Vac valve closed
5/8/2010	4:11:48 PM	Bypass valve closed
5/8/2010	4:11:48 PM	H2 valve opened
5/8/2010	4:11:48 PM	SiCl4 pre valve opened
5/8/2010	4:11:48 PM	SiCl4 post valve opened
5/8/2010	4:11:48 PM	Bubbler valve opened
5/8/2010	4:11:48 PM	Helium MFC set to  0.000000
5/8/2010	4:11:48 PM	H2 MFC set to  500.000000
5/8/2010	4:11:48 PM	BCl3 MFC set to  0.000000
5/8/2010	4:11:48 PM	SiCl4 MFC set to  325.000000
5/8/2010	4:11:48 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	4:11:49 PM	Tube furnace set to 1000
5/8/2010	4:31:49 PM	H2 valve closed
5/8/2010	4:31:49 PM	BCl3 valve closed
5/8/2010	4:31:49 PM	PH3 valve closed
5/8/2010	4:31:49 PM	SiCl4 pre valve closed
5/8/2010	4:31:49 PM	SiCl4 post valve closed
5/8/2010	4:31:49 PM	Main Vac valve closed
5/8/2010	4:31:49 PM	Bypass valve closed
5/8/2010	4:31:49 PM	Helium valve opened
5/8/2010	4:31:49 PM	Bubbler valve opened
5/8/2010	4:31:49 PM	Helium MFC set to  500.000000
5/8/2010	4:31:49 PM	H2 MFC set to  0.000000
5/8/2010	4:31:49 PM	BCl3 MFC set to  0.000000
5/8/2010	4:31:49 PM	SiCl4 MFC set to  0.000000
5/8/2010	4:31:49 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	4:31:49 PM	Tube furnace set to 750
5/8/2010	4:48:33 PM	H2 valve closed
5/8/2010	4:48:33 PM	BCl3 valve closed
5/8/2010	4:48:33 PM	PH3 valve closed
5/8/2010	4:48:33 PM	SiCl4 pre valve closed
5/8/2010	4:48:33 PM	SiCl4 post valve closed
5/8/2010	4:48:33 PM	Main Vac valve closed
5/8/2010	4:48:33 PM	Bypass valve closed
5/8/2010	4:48:33 PM	Helium valve opened
5/8/2010	4:48:33 PM	Bubbler valve opened
5/8/2010	4:48:33 PM	Helium MFC set to  500.000000
5/8/2010	4:48:33 PM	H2 MFC set to  0.000000
5/8/2010	4:48:33 PM	BCl3 MFC set to  0.000000
5/8/2010	4:48:33 PM	SiCl4 MFC set to  0.000000
5/8/2010	4:48:33 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	4:48:33 PM	Tube furnace set to 0
5/8/2010	4:49:08 PM	Helium valve closed
5/8/2010	4:49:08 PM	H2 valve closed
5/8/2010	4:49:08 PM	BCl3 valve closed
5/8/2010	4:49:08 PM	PH3 valve closed
5/8/2010	4:49:08 PM	SiCl4 pre valve closed
5/8/2010	4:49:08 PM	SiCl4 post valve closed
5/8/2010	4:49:08 PM	Main Vac valve closed
5/8/2010	4:49:08 PM	Bypass valve closed
5/8/2010	4:49:08 PM	Bubbler valve closed
5/8/2010	4:49:08 PM	Helium MFC set to  0.000000
5/8/2010	4:49:08 PM	H2 MFC set to  0.000000
5/8/2010	4:49:08 PM	BCl3 MFC set to  0.000000
5/8/2010	4:49:08 PM	SiCl4 MFC set to  0.000000
5/8/2010	4:49:08 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	4:49:08 PM	Tube furnace set to 0
5/8/2010	4:49:08 PM	Run finished at 4:49 PM
5/8/2010	4:55:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	4:55:52 PM	Recipe started at 4:55 PM
5/8/2010	4:55:52 PM	Helium valve closed
5/8/2010	4:55:52 PM	H2 valve closed
5/8/2010	4:55:52 PM	BCl3 valve closed
5/8/2010	4:55:52 PM	PH3 valve closed
5/8/2010	4:55:52 PM	SiCl4 pre valve closed
5/8/2010	4:55:52 PM	SiCl4 post valve closed
5/8/2010	4:55:52 PM	Main Vac valve closed
5/8/2010	4:55:52 PM	Bubbler valve closed
5/8/2010	4:55:52 PM	Bypass valve opened
5/8/2010	4:55:52 PM	Helium MFC set to  0.000000
5/8/2010	4:55:52 PM	H2 MFC set to  0.000000
5/8/2010	4:55:52 PM	BCl3 MFC set to  0.000000
5/8/2010	4:55:52 PM	SiCl4 MFC set to  0.000000
5/8/2010	4:55:52 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	4:55:53 PM	Tube furnace set to 0
5/8/2010	4:56:37 PM	Helium valve closed
5/8/2010	4:56:37 PM	H2 valve closed
5/8/2010	4:56:37 PM	BCl3 valve closed
5/8/2010	4:56:37 PM	PH3 valve closed
5/8/2010	4:56:37 PM	SiCl4 pre valve closed
5/8/2010	4:56:37 PM	SiCl4 post valve closed
5/8/2010	4:56:37 PM	Bubbler valve closed
5/8/2010	4:56:37 PM	Main Vac valve opened
5/8/2010	4:56:37 PM	Bypass valve opened
5/8/2010	4:56:37 PM	Helium MFC set to  0.000000
5/8/2010	4:56:37 PM	H2 MFC set to  0.000000
5/8/2010	4:56:37 PM	BCl3 MFC set to  0.000000
5/8/2010	4:56:37 PM	SiCl4 MFC set to  0.000000
5/8/2010	4:56:37 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	4:56:37 PM	Tube furnace set to 0
5/8/2010	4:56:37 PM	Run finished at 4:56 PM
5/8/2010	4:56:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	5:03:44 PM	Helium MFC set to  100.000000
5/8/2010	5:03:45 PM	Helium valve opened
5/8/2010	5:04:26 PM	Helium valve closed
5/8/2010	5:05:12 PM	Helium valve opened
5/8/2010	5:08:54 PM	Helium valve closed
5/8/2010	5:10:38 PM	Recipe started at 5:10 PM
5/8/2010	5:10:38 PM	Helium valve closed
5/8/2010	5:10:38 PM	BCl3 valve closed
5/8/2010	5:10:38 PM	PH3 valve closed
5/8/2010	5:10:38 PM	SiCl4 pre valve closed
5/8/2010	5:10:38 PM	SiCl4 post valve closed
5/8/2010	5:10:38 PM	Main Vac valve closed
5/8/2010	5:10:38 PM	Bypass valve closed
5/8/2010	5:10:38 PM	Bubbler valve closed
5/8/2010	5:10:38 PM	H2 valve opened
5/8/2010	5:10:38 PM	Helium MFC set to  0.000000
5/8/2010	5:10:38 PM	H2 MFC set to  500.000000
5/8/2010	5:10:38 PM	BCl3 MFC set to  0.000000
5/8/2010	5:10:38 PM	SiCl4 MFC set to  0.000000
5/8/2010	5:10:38 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	5:10:39 PM	Tube furnace set to 0
5/8/2010	5:12:00 PM	Helium valve closed
5/8/2010	5:12:00 PM	BCl3 valve closed
5/8/2010	5:12:00 PM	PH3 valve closed
5/8/2010	5:12:00 PM	SiCl4 pre valve closed
5/8/2010	5:12:00 PM	SiCl4 post valve closed
5/8/2010	5:12:00 PM	Main Vac valve closed
5/8/2010	5:12:00 PM	Bypass valve closed
5/8/2010	5:12:00 PM	H2 valve opened
5/8/2010	5:12:00 PM	Bubbler valve opened
5/8/2010	5:12:00 PM	Helium MFC set to  0.000000
5/8/2010	5:12:00 PM	H2 MFC set to  500.000000
5/8/2010	5:12:00 PM	BCl3 MFC set to  0.000000
5/8/2010	5:12:00 PM	SiCl4 MFC set to  0.000000
5/8/2010	5:12:00 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	5:12:00 PM	Tube furnace set to 1000
5/8/2010	5:32:00 PM	Helium valve closed
5/8/2010	5:32:00 PM	BCl3 valve closed
5/8/2010	5:32:00 PM	PH3 valve closed
5/8/2010	5:32:00 PM	Main Vac valve closed
5/8/2010	5:32:00 PM	Bypass valve closed
5/8/2010	5:32:00 PM	H2 valve opened
5/8/2010	5:32:00 PM	SiCl4 pre valve opened
5/8/2010	5:32:00 PM	SiCl4 post valve opened
5/8/2010	5:32:00 PM	Bubbler valve opened
5/8/2010	5:32:00 PM	Helium MFC set to  0.000000
5/8/2010	5:32:00 PM	H2 MFC set to  500.000000
5/8/2010	5:32:00 PM	BCl3 MFC set to  0.000000
5/8/2010	5:32:00 PM	SiCl4 MFC set to  350.000000
5/8/2010	5:32:00 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	5:32:01 PM	Tube furnace set to 1000
5/8/2010	5:52:01 PM	H2 valve closed
5/8/2010	5:52:01 PM	BCl3 valve closed
5/8/2010	5:52:01 PM	PH3 valve closed
5/8/2010	5:52:01 PM	SiCl4 pre valve closed
5/8/2010	5:52:01 PM	SiCl4 post valve closed
5/8/2010	5:52:01 PM	Main Vac valve closed
5/8/2010	5:52:01 PM	Bypass valve closed
5/8/2010	5:52:01 PM	Helium valve opened
5/8/2010	5:52:01 PM	Bubbler valve opened
5/8/2010	5:52:01 PM	Helium MFC set to  500.000000
5/8/2010	5:52:01 PM	H2 MFC set to  0.000000
5/8/2010	5:52:01 PM	BCl3 MFC set to  0.000000
5/8/2010	5:52:01 PM	SiCl4 MFC set to  0.000000
5/8/2010	5:52:01 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	5:52:01 PM	Tube furnace set to 750
5/8/2010	6:12:01 PM	H2 valve closed
5/8/2010	6:12:01 PM	BCl3 valve closed
5/8/2010	6:12:01 PM	PH3 valve closed
5/8/2010	6:12:01 PM	SiCl4 pre valve closed
5/8/2010	6:12:01 PM	SiCl4 post valve closed
5/8/2010	6:12:01 PM	Main Vac valve closed
5/8/2010	6:12:01 PM	Bypass valve closed
5/8/2010	6:12:01 PM	Helium valve opened
5/8/2010	6:12:01 PM	Bubbler valve opened
5/8/2010	6:12:01 PM	Helium MFC set to  500.000000
5/8/2010	6:12:01 PM	H2 MFC set to  0.000000
5/8/2010	6:12:01 PM	BCl3 MFC set to  0.000000
5/8/2010	6:12:01 PM	SiCl4 MFC set to  0.000000
5/8/2010	6:12:01 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	6:12:01 PM	Tube furnace set to 0
5/8/2010	6:18:01 PM	Helium valve closed
5/8/2010	6:18:01 PM	H2 valve closed
5/8/2010	6:18:01 PM	BCl3 valve closed
5/8/2010	6:18:01 PM	PH3 valve closed
5/8/2010	6:18:01 PM	SiCl4 pre valve closed
5/8/2010	6:18:01 PM	SiCl4 post valve closed
5/8/2010	6:18:01 PM	Main Vac valve closed
5/8/2010	6:18:01 PM	Bypass valve closed
5/8/2010	6:18:01 PM	Bubbler valve closed
5/8/2010	6:18:01 PM	Helium MFC set to  0.000000
5/8/2010	6:18:01 PM	H2 MFC set to  0.000000
5/8/2010	6:18:01 PM	BCl3 MFC set to  0.000000
5/8/2010	6:18:01 PM	SiCl4 MFC set to  0.000000
5/8/2010	6:18:01 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	6:18:01 PM	Tube furnace set to 0
5/8/2010	6:18:01 PM	Run finished at 6:18 PM
5/8/2010	6:19:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	6:19:56 PM	Recipe started at 6:19 PM
5/8/2010	6:19:56 PM	Helium valve closed
5/8/2010	6:19:56 PM	H2 valve closed
5/8/2010	6:19:56 PM	BCl3 valve closed
5/8/2010	6:19:56 PM	PH3 valve closed
5/8/2010	6:19:56 PM	SiCl4 pre valve closed
5/8/2010	6:19:56 PM	SiCl4 post valve closed
5/8/2010	6:19:56 PM	Main Vac valve closed
5/8/2010	6:19:56 PM	Bubbler valve closed
5/8/2010	6:19:56 PM	Bypass valve opened
5/8/2010	6:19:56 PM	Helium MFC set to  0.000000
5/8/2010	6:19:56 PM	H2 MFC set to  0.000000
5/8/2010	6:19:56 PM	BCl3 MFC set to  0.000000
5/8/2010	6:19:56 PM	SiCl4 MFC set to  0.000000
5/8/2010	6:19:56 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	6:19:56 PM	Tube furnace set to 0
5/8/2010	6:20:39 PM	Helium valve closed
5/8/2010	6:20:39 PM	H2 valve closed
5/8/2010	6:20:39 PM	BCl3 valve closed
5/8/2010	6:20:39 PM	PH3 valve closed
5/8/2010	6:20:39 PM	SiCl4 pre valve closed
5/8/2010	6:20:39 PM	SiCl4 post valve closed
5/8/2010	6:20:39 PM	Bubbler valve closed
5/8/2010	6:20:39 PM	Main Vac valve opened
5/8/2010	6:20:39 PM	Bypass valve opened
5/8/2010	6:20:39 PM	Helium MFC set to  0.000000
5/8/2010	6:20:39 PM	H2 MFC set to  0.000000
5/8/2010	6:20:39 PM	BCl3 MFC set to  0.000000
5/8/2010	6:20:39 PM	SiCl4 MFC set to  0.000000
5/8/2010	6:20:39 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	6:20:39 PM	Tube furnace set to 0
5/8/2010	6:20:40 PM	Run finished at 6:20 PM
5/8/2010	6:20:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	7:27:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2010	7:27:24 PM	Recipe started at 7:27 PM
5/8/2010	7:27:24 PM	H2 valve closed
5/8/2010	7:27:24 PM	BCl3 valve closed
5/8/2010	7:27:24 PM	PH3 valve closed
5/8/2010	7:27:24 PM	SiCl4 pre valve closed
5/8/2010	7:27:24 PM	SiCl4 post valve closed
5/8/2010	7:27:24 PM	Main Vac valve closed
5/8/2010	7:27:24 PM	Bypass valve closed
5/8/2010	7:27:24 PM	Bubbler valve closed
5/8/2010	7:27:24 PM	Helium valve opened
5/8/2010	7:27:24 PM	Helium MFC set to  500.000000
5/8/2010	7:27:24 PM	H2 MFC set to  0.000000
5/8/2010	7:27:24 PM	BCl3 MFC set to  0.000000
5/8/2010	7:27:24 PM	SiCl4 MFC set to  0.000000
5/8/2010	7:27:24 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	7:27:24 PM	Tube furnace set to 0
5/8/2010	7:28:45 PM	Helium valve closed
5/8/2010	7:28:45 PM	H2 valve closed
5/8/2010	7:28:45 PM	BCl3 valve closed
5/8/2010	7:28:45 PM	PH3 valve closed
5/8/2010	7:28:45 PM	SiCl4 pre valve closed
5/8/2010	7:28:45 PM	SiCl4 post valve closed
5/8/2010	7:28:45 PM	Main Vac valve closed
5/8/2010	7:28:45 PM	Bypass valve closed
5/8/2010	7:28:45 PM	Bubbler valve closed
5/8/2010	7:28:45 PM	Helium MFC set to  0.000000
5/8/2010	7:28:45 PM	H2 MFC set to  0.000000
5/8/2010	7:28:45 PM	BCl3 MFC set to  0.000000
5/8/2010	7:28:45 PM	SiCl4 MFC set to  0.000000
5/8/2010	7:28:45 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	7:28:45 PM	Tube furnace set to 0
5/8/2010	7:28:45 PM	Run finished at 7:28 PM
5/8/2010	7:28:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/8/2010	7:39:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	7:39:44 PM	Recipe started at 7:39 PM
5/8/2010	7:39:44 PM	Helium valve closed
5/8/2010	7:39:44 PM	H2 valve closed
5/8/2010	7:39:44 PM	BCl3 valve closed
5/8/2010	7:39:44 PM	PH3 valve closed
5/8/2010	7:39:44 PM	SiCl4 pre valve closed
5/8/2010	7:39:44 PM	SiCl4 post valve closed
5/8/2010	7:39:44 PM	Main Vac valve closed
5/8/2010	7:39:44 PM	Bubbler valve closed
5/8/2010	7:39:44 PM	Bypass valve opened
5/8/2010	7:39:44 PM	Helium MFC set to  0.000000
5/8/2010	7:39:44 PM	H2 MFC set to  0.000000
5/8/2010	7:39:44 PM	BCl3 MFC set to  0.000000
5/8/2010	7:39:44 PM	SiCl4 MFC set to  0.000000
5/8/2010	7:39:44 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	7:39:44 PM	Tube furnace set to 0
5/8/2010	7:40:34 PM	Helium valve closed
5/8/2010	7:40:34 PM	H2 valve closed
5/8/2010	7:40:34 PM	BCl3 valve closed
5/8/2010	7:40:34 PM	PH3 valve closed
5/8/2010	7:40:34 PM	SiCl4 pre valve closed
5/8/2010	7:40:34 PM	SiCl4 post valve closed
5/8/2010	7:40:34 PM	Bubbler valve closed
5/8/2010	7:40:34 PM	Main Vac valve opened
5/8/2010	7:40:34 PM	Bypass valve opened
5/8/2010	7:40:34 PM	Helium MFC set to  0.000000
5/8/2010	7:40:34 PM	H2 MFC set to  0.000000
5/8/2010	7:40:34 PM	BCl3 MFC set to  0.000000
5/8/2010	7:40:34 PM	SiCl4 MFC set to  0.000000
5/8/2010	7:40:34 PM	Bypass solenoid MFC set to  0.000000
5/8/2010	7:40:34 PM	Tube furnace set to 0
5/8/2010	7:40:34 PM	Run finished at 7:40 PM
5/8/2010	7:40:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/8/2010	7:44:59 PM	Helium MFC set to  300.000000
5/8/2010	7:45:00 PM	Helium valve opened
5/8/2010	7:45:05 PM	Helium valve closed
5/8/2010	7:45:43 PM	Helium valve opened
5/8/2010	7:46:30 PM	Helium valve closed
5/8/2010	7:47:39 PM	Helium valve opened
5/8/2010	7:48:46 PM	Helium valve closed
5/8/2010	7:49:47 PM	Helium MFC set to  200.000000
5/8/2010	7:49:48 PM	Helium valve opened
5/8/2010	7:55:14 PM	Helium valve closed
5/8/2010	7:56:15 PM	Helium valve opened
5/8/2010	8:02:11 PM	Helium valve closed
